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Volumn 45, Issue 3 PART 1, 1998, Pages 585-590

Investigation of epitaxial silicon layers as a material for radiation hardened silicon detectors1

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; EPITAXIAL GROWTH; IRRADIATION; NEUTRONS; PROTONS; RADIATION DAMAGE; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON;

EID: 0032098093     PISSN: 00189499     EISSN: None     Source Type: Journal    
DOI: 10.1109/23.682453     Document Type: Article
Times cited : (9)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.