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Volumn 83, Issue 11, 1998, Pages 5787-5791

Stress relaxation in Si-doped GaN studied by Raman spectroscopy

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); ESTIMATION; METALLORGANIC VAPOR PHASE EPITAXY; NATURAL FREQUENCIES; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SEMICONDUCTING FILMS; SEMICONDUCTOR DOPING; SILICON; STRESS RELAXATION;

EID: 0032094714     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367501     Document Type: Article
Times cited : (83)

References (27)
  • 22
    • 85034487448 scopus 로고    scopus 로고
    • note
    • GaN is the thermal expansion coefficient of sapphire and GaN, respectively.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.