Scanning near-field optical microscopy analyses of electronic devices

Microelectronics Reliability

Volumn 38, Issue 6-8, 1998, Pages 963-968

  Cramer, R M ^a   Schade, W R ^a   Heiderhoff, R ^a   Balk, L J ^a   Chin, R ^b  

^a UNIVERSITY OF WUPPERTAL   (Germany)

^b INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC CURRENTS; ELECTRONIC PROPERTIES; FAILURE ANALYSIS; METALLIZING; OPTICAL MICROSCOPY;

SCANNING NEAR-FIELD OPTICAL MICROSCOPY;

INTEGRATED CIRCUIT TESTING;

EID: 0032083822     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(98)00082-1     Document Type: Article

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