Micromachined aperture probe tip for multifunctional scanning probe microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3009, Issue , 1997, Pages 34-42

  Abraham, Michael ^d   Ehrfeld, Wolfgang ^d   Lacher, Manfred ^d   Mayr, Karsten ^d   Noell, Wilfried ^a   Güthner, Peter ^b   Barenz, Joachim ^c  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

^b Omicron Vakuumphysik GmbH   (Germany)

^c UNIVERSITY OF ULM   (Germany)

^d NONE

Author keywords

Atomic force microscopy; Integrated optics; Micromaching; Nearfield scanning optical microscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMIC PHYSICS; ATOMS; BATCH DATA PROCESSING; COMPOSITE MICROMECHANICS; INTEGRATED CIRCUITS; INTEGRATED OPTICS; MACHINING; MICROMACHINING; OPTICAL DATA STORAGE; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; OPTICAL INSTRUMENTS; OPTICAL MATERIALS; OPTICAL MICROSCOPY; PHOTONICS; PROBES; SCANNING; SCANNING ELECTRON MICROSCOPY; SCANNING PROBE MICROSCOPY; SENSORS;

BATCH PROCESSING; HIGH REPRODUCIBILITY; MICRO ASSEMBLIES; MICROMACHINED; MICROMACHING; NEW CONCEPT; PROBE MICROSCOPY; PROBE TIPS;

NEAR FIELD SCANNING OPTICAL MICROSCOPY;

EID: 1542629592     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271226     Document Type: Conference Paper

References (15)

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