Advanced thin-film silicon-on-sapphire technology: microwave circuit applications

IEEE Transactions on Electron Devices

Volumn 45, Issue 5, 1998, Pages 1047-1054

  Johnson, Robb A ^a   De La Houssaye, Paul R ^b   Chang, Charles E ^c   Chen, Pin Fan ^a   Wood, Michael E ^a   Garcia, Graham A ^d   Lagnado, Isaac ^a   Asbeck, Peter M ^d  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b IBM MICROELECTRONICS   (United States)

^c Naval Command   (United States)

^d ROCKWELL SCIENCE CENTER   (United States)

Author keywords

CMOSFET's; Microwave integrated circuits; Silicon on insulator technology; Thin film inductors; Transceiver

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC INDUCTORS; MICROWAVE INTEGRATED CIRCUITS; MOSFET DEVICES; SILICON ON INSULATOR TECHNOLOGY; THIN FILM DEVICES; TRANSCEIVERS;

THIN FILM SILICON ON SAPPHIRE TECHNOLOGY (TFSOS);

SILICON ON SAPPHIRE TECHNOLOGY;

EID: 0032072224     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.669525     Document Type: Article

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