Combined AFM and laser lithography on hydrogen-passivated amorphous silicon

Superlattices and Microstructures

Volumn 20, Issue 4, 1996, Pages 555-560

  Birkelund, Karen ^a   Müllenborn, Matthias ^a   Grey, François ^a   Jensen, Flemming ^a   Madsen, Steen ^b  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b DME Danish Micro Engineering A/S   (Denmark)

Author keywords

Hydrogen passivated silicon; Nanolithography; Scanning probe microscopes

Indexed keywords

AMORPHOUS SILICON; LASER APPLICATIONS; LITHOGRAPHY; NANOSTRUCTURED MATERIALS; OXIDATION;

HYDROGEN PASSIVATED SILICON; LASER LITHOGRAPHY; SCANNING PROBE MICROSCOPY;

NANOTECHNOLOGY;

EID: 0030381260     PISSN: 07496036     EISSN: None     Source Type: Journal    
DOI: 10.1006/spmi.1996.0114     Document Type: Article

References (17)

1. L. A. Nagahara, P. I. Oden, A. Majumdar, J. P. Carrejo, J. Graham and K. Alexander, SPIE Scanning Probe Microscopies 1639, 171 (1992).
2. L. L. Sohn and R. L. Willet, NT2 FRIDAY, p. 1-4.
3. M. Wendel, S. Kühn, H. Lorenz and J. P. Kotthaus, Appl. Phys. Lett. 65, 1775 (1994).
4. E. S. Snow and P. M. Campbell, Appl. Phys. Lett. 64, 1932 (1994).
5. D. Wang, L. Tsau and K. L. Wang, Appl. Phys. Lett. 67, 1295 (1995).
6. S. C. Minne, Ph. Flueckiger, H. T. Soh and C. F. Quate, J. Vac. Sci. Technol. B 13, 1380 (1995).
7. E. S. Snow, W. H. Juan, S. W. Pang and P. M. Campbell, Appl. Phys. Lett. 66, 1727 (1995).
8. G. C. Abeln, T. C. Shen, J. R. Tucker and J. W. Lyding, Microelectronic Engineering 27, 23 (1995).
9. K. Matsumoto, M. Ishii, K. Segawa and Y. Oka, Appl. Phys. Lett. 65, 34 (1996).
10. S. C. Minne, H. T. Soh, Ph. Flueckiger and C. F. Quate, Appl. Phys. Lett. 66, 703 (1995).
11. M. Müllenborn, H. Dirac J. W. Petersen, Appl. Phys. Lett. 66, 3001 (1995).
12. N. Kramer, M. Niesten and C. Schönenberger, Appl. Phys. Lett. 67, 2989 (1995).
13. M. Müllenborn, K. Birkelund, S. Madsen and F. Grey, Appl. Phys. Lett., to be published.
14. L. Tsau, D. Wang and K. L. Wang, Appl. Phys. Lett. 64, 2133 (1994).
15. H. C. Day and D. R. Allee, Appl. Phys. Lett. 62, 2691 (1993).
16. S. Madsen, M. Müllenborn, K. Birkelund and F. Grey, Appl. Phys. Lett., to be published.
17. E. Betzig, P. L. Finn and I. S. Weiner, Appl. Phys. Lett. 60, 2484 (1992).