Advancements in MEMS materials and processing technology

JOM

Volumn 50, Issue 1, 1998, Pages 38-43

  Olivas, John D ^a,b   Bolin, Stephen ^b,c  

^a RICE UNIVERSITY   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^c STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENGINEERING RESEARCH; MATERIALS SCIENCE;

MATERIALS PROCESSING TECHNOLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 0031646418     PISSN: 10474838     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11837-998-0066-3     Document Type: Review

References (32)

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