Sensor principles and methods for measuring physical properties

JOM

Volumn 48, Issue 9, 1996, Pages 16-23

  Jackson, A G ^a,b,c   Laube, S J P ^a,b   Busbee, J ^b,c  

^a UNIVERSITY OF CINCINNATI   (United States)

^b Wright Laboratory

^c TMS ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTELLIGENT MATERIALS; MEASUREMENT ERRORS; MEASUREMENTS; MICROELECTROMECHANICAL DEVICES; PHYSICAL PROPERTIES; PROCESS CONTROL; PROCESSING; PRODUCT DESIGN; TECHNOLOGY; THIN FILMS;

EMBEDDED SENSORS; PHYSICAL PROPERTIES MEASUREMENT; PRODUCT DEVELOPMENT; SENSOR PRINCIPLES; SENSOR TECHNOLOGY;

SENSORS;

EID: 0030243847     PISSN: 10474838     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF03223067     Document Type: Review

References (18)

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8. John Staley, "Platinum Thin Film Next-Generation Micromachined Sensors," Sensors (April 1996), pp. 56-62.
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16. J. Fraden, AIP Handbook of Modern Sensors (New York: American Institute of Physics, 1993).
17. A.G. Jackson and S.J.P. Laube, private communication (1996).
18. H. Fischbeck and K. Fischbeck, Formulas, Facts and Constants (New York: Springer-Verlag, 1987).