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Volumn 53, Issue 1-3, 1996, Pages 405-409

A micromachined single-chip inkjet printhead

Author keywords

Inkjet printheads; Micromachining

Indexed keywords


EID: 0343888723     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)80163-4     Document Type: Article
Times cited : (20)

References (11)
  • 2
    • 0026927516 scopus 로고
    • A fully integrated silicon-based 40 V thermal ink jet IC
    • W.G. Hawkins et al., a fully integrated silicon-based 40 V thermal ink jet IC, Microelectronic Eng., 19 (1992) 165-170.
    • (1992) Microelectronic Eng. , vol.19 , pp. 165-170
    • Hawkins, W.G.1
  • 3
    • 30244521004 scopus 로고
    • Tintendrucktechnologie: Paradigma und motor der mikrosystemtechnik (inkjet technology: Paradigm and driving force of the microsystem technique)
    • Germany, Ch. 6 (part 1), Ch.9 (part 2 in press)
    • W. Wehl, Tintendrucktechnologie: Paradigma und Motor der Mikrosystemtechnik (Inkjet technology: paradigm and driving force of the microsystem technique), F and M Feinwerktechnik Mikrotechnik Meβtechnik, Germany, 1995, Ch. 6 (part 1), Ch.9 (part 2 in press).
    • (1995) F and M Feinwerktechnik Mikrotechnik Meβtechnik
    • Wehl, W.1
  • 5
    • 0018030427 scopus 로고
    • Anisotropic etching of silicon
    • K.E. Bean, Anisotropic etching of silicon, IEEE Trans. Electron Devices, ED-25 (1978) 1185-1193.
    • (1978) IEEE Trans. Electron Devices , vol.ED-25 , pp. 1185-1193
    • Bean, K.E.1
  • 7
    • 0029323744 scopus 로고
    • Etch rate and surface roughness of deep narrow U-grooves in (110)-oriented silicon
    • P. Krause and E. Obermeier, Etch rate and surface roughness of deep narrow U-grooves in (110)-oriented silicon. J. Micromech. Microeng., 5 (1995) 1-3.
    • (1995) J. Micromech. Microeng. , vol.5 , pp. 1-3
    • Krause, P.1    Obermeier, E.2
  • 9


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.