Micromachined heaters with 1-μs thermal time constants for AFM thermomechanical data storage

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1085-1088

  Chui, Benjamin W ^a   Mamin, H Jonathon ^a   Terris, Bruce D ^a   Rugar, Dan ^a   Goodson, Kenneth E ^a   Kenny, Thomas W ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; ELECTRIC VARIABLES MEASUREMENT; HEATING EQUIPMENT; PIEZOELECTRIC MATERIALS; THERMAL VARIABLES MEASUREMENT; THERMODYNAMIC PROPERTIES;

MICROMACHINED HEATERS; SINGLE CRYSTAL SILICON CANTILEVERS; THERMAL TIME CONSTANTS; THERMAL WRITING; THERMOMECHANICAL DATA STORAGE;

DATA STORAGE EQUIPMENT;

EID: 0030654808     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)