Diamond-like carbon films synthesized by cathodic arc evaporation

Thin Solid Films

Volumn 209, Issue 2, 1992, Pages 165-173

  Coll, B F ^a   Sathrum, P ^a   Aharonov, R ^a   Tamor, M A ^b  

^a Multi Arc Inc   (United States)

^b FORD MOTOR COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON - ELECTRIC CONDUCTIVITY; CARBON - EVAPORATION; FILMS - CHEMICAL DEPOSITION; FILMS - HYDROGENATION; FILMS - SYNTHESIS;

CATHODIC ARC EVAPORATION; DIAMOND-LIKE CARBON FILMS (DLC); HYDROGENERATED CARBON FILMS;

CARBON;

EID: 0026837516     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(92)90670-7     Document Type: Article

References (22)

1. Interface modifications for improving the adhesion of a-C:H films to metals
2. Erosion and the origin of charged and neutral species in vacuum arcs
3. Characterization of as-prepared and annealed hydrogenated carbon films
4. Raman scattering characterization of carbon bonding in diamond and diamondlike thin films
5. Raman scattering, laser annealing and pressure-optical studies of ion beam deposited amorphous carbon films
6. Ion beam self-sputtering using a cathodic arc ion source