Unstable arc operation and cathode spot motion in a magnetically filtered vacuum-arc deposition system

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 13, Issue 4, 1995, Pages 2233-2240

  Zhitomirsky, V N ^a   Boxman, R L ^a   Goldsmith, S ^a  

^a TEL AVIV UNIVERSITY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21844497234     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.579548     Document Type: Article

References (50)

1. R. L. Boxman and S. Goldsmith, Surf. Coat. Technol. 52, 39 (1992).
2. I.I. Aksenov, V.A. Belous, V. G. Padalka, and V. M. Khoroshikh, Sov. J. Plasma Phys. 4, 425 (1978).
3. I.I. Aksenov, V.G. Padalka, N.S. Repalov, and V.M. Khoroshikh, Sov. J. Plasma Phys. 6, 173 (1980).
4. H. Randhawa, J. Vac. Sci. Technol. A 7, 2346 (1989).
5. P.J. Martin, R.P. Netterfield, and T.J. Kinder, Thin Solid Films 193/194, 77 (1990).
6. P.J. Martin, R.P. Netterfield, A. Bendavid, and T.J. Kinder, Surf. Coat. Technol. 54/55, 136 (1992).
7. A. Bendavid, P.J. Martin, R.P. Netterfield, T.J. Slogett, T.J. Kinder, and C. Andrikidis, J. Mater. Sci. Lett. 12, 322 (1993).
8. S. Falabella and D.M. Sanders, J. Vac. Sci. Technol. A 10, 394 (1992).
9. J. Storer, J.E. Galvin, and I.G. Brown, J. Appl. Phys. 66, 5245 (1989).
10. C.A. Davis, M.K. Puchert, D.R. McKenzie, and B.W. James, Proceedings of the XVth International Symposium on Discharges and Electrical Insulation in Vacuum, Darmstadt, Germany, 1992 (unpublished), pp. 690–693.
11. M.K. Puchert, C.A. Davis, D.R. McKenzie, and B.W. James, J. Vac. Sci. Technol. A 10, 3493 (1992).
12. A. Ben-Shalom, L. Kaplan, R.L. Boxman, S. Goldsmith, and M. Nathan, Thin Solid Films 236, 20 (1993).
13. R.L. Boxman et al., Proceedings of the XVIth International Symposium on Discharges and Electrical Insulation in Vacuum, St. Petersburg, Moscow, 1994 (unpublished), pp. 90–95.
14. D. B. Boercker, D. M. Sanders, J. Storer, and S. Falabela, J. Appl. Phys. 69, 115 (1991).
15. C. A. Davis and I. J. Donnelly, J. Appl. Phys. 72, 1740 (1992).
16. V.S. Veerasamy, G.A.J. Amaratunga, and W.I. Milne, IEEE Trans. Plasma Soc. PS-21, 322 (1993).
17. E. Gidalevich, S. Goldsmith, and R. Boxman in Ref. 13, pp. 122–127.
18. S. Anders, A. Anders, and I. Brown, J. Appl. Phys. 74, 4239 (1993).
19. A. Anders, S. Anders, I. G. Brown, R. A. McGill, and M. R. Dickinson, in Ref. 13, pp. 195–198.
20. S. Anders, A. Anders, and I. Brown, J. Appl. Phys. 75, 4895 (1994).
21. A. Anders, S. Anders, and I. Brown, J. Appl. Phys. 75, 4900 (1994).
22. V.N. Zhitomirsky, R.L. Boxman, and S. Goldsmith, Surf. Coat. Technol. 68/69, 146 (1994).
23. I.G. Kesaev, Cathodic Processes in Electric Arc (Nauka, Moscow, 1968), pp. 43–49, 160–170 (in Russian).
24. L.P. Harris, in Vacuum Arcs, Theory and Application, edited by J.M. Lafferty (Wiley, New York, 1980).
25. R.L. Boxman and S. Goldsmith, Surf. Coat. Technol. 33, 153 (1987).
26. G. A. Lyubimov and V. I. Rachovskii, Sov. Phys. Usp. 21, 693 (1978).
27. B. Juttner, Proceedings of the Xllth International Symposium on Discharges and Electrical Insulation in Vacuum, New York, 1986 (unpublished), pp. 90–98.
28. V.A. Nemchinskii, Sov. Phys. Tech. Phys. 28, 150 (1983).
29. B.Ya. Moizhes and V.A. Nemchinsky, J. Phys. D 24, 2014 (1991).
30. E.A. Litvinov, G.A. Mesyats, A.G. Parfenov, and E.Yu. Sadovskaya, Sov. Tech. Phys. Lett. 16, 723 (1990).
31. H.O. Schrade, IEEE Trans. Plasma Sci. PS-17, 635 (1989).
32. D. M. Sanders, D. B. Boercker, and S. Falabella, IEEE Trans. Plasma Sci. PS-18, 883 (1990).
33. A. Ishaaya (private communication).
34. J. Vyskocil and J. Musil, Surf. Coat. Technol. 43/44, 299 (1990).
35. D. Y. Fang, J. Phys. D 15, 833 (1982).
36. QuickField, Finite Element Analysys System, Version 3.2, User’s Guide (Tera Analysis, Granada Hills, CA, 1994).
37. I. I. Aksenov, V. G. Padalka, and V. M. Khoroshikh, The Formation of Metallic Plasma Flow. A Review (CNII Atominform, Moscow, 1984) (in Russian).
38. A.S. Gilmour, Jr., U.S. Patent No. 3 437 260, Int. Cl. F04B 37/02, 17.08.67.
39. J.-L. Delcroix, Introduction to the Theory of Ionized Gazes (Interscience, New York, 1960).
40. L. Spitzer, Jr., Physics of Fully Ionized Gases (Interscience, New York, London, 1962).
41. J. Kutzner, Physica 104 C, 116 (1981).
42. R.L. Boxman and S. Goldsmith, J. Appl. Phys. 54, 592 (1983).
43. M. Steenbeck, Phys. Z 33, 809 (1932).
44. M. Steenbeck, Beitr. Plasmaphys. 1, 1 (1960 –61).
45. F. Krause und M. Steenbeck, Beitr. Plasmaphys. 1, 65 (1960 –61).
46. G. Ecker, in Ref. 24, pp. 228–320.
47. A.S. Gilmour and D.L. Lockwood, Proc. IEEE 60, 977 (1972).
48. G. A. Farrall, in Ref. 24, pp. 184–227.
49. D.B. Boercker, S. Falabella, D.M. Sanders, Surf. Coat. Technol.,53, 239 (1992).
50. C. A. Davis, Ph.D. thesis, The University of Sydney, Australia, 1993, pp. 48–51.