Comparison of two filtered cathodic arc sources

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 10, Issue 2, 1992, Pages 394-397

  Falabella, S ^a   Sanders, D M ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001040562     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.578062     Document Type: Article

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