UHV STM nanofabrication: Progress, technology spin-offs, and challenges

Proceedings of the IEEE

Volumn 85, Issue 4, 1997, Pages 589-600

  Lyding, Joseph W ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CMOS INTEGRATED CIRCUITS; DESORPTION; DEUTERIUM; METALLIZING; NITRIDING; OXIDATION; PASSIVATION; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTING SILICON; SURFACE TREATMENT;

ULTRAHIGH VACUUM SCANNING TUNNELING MICROSCOPE (UHV STM);

NANOTECHNOLOGY;

EID: 0031123838     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/5.573743     Document Type: Article

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