Nanoscale patterning and selective chemistry of silicon surfaces by ultrahigh-vacuum scanning tunneling microscopy

Nanotechnology

Volumn 7, Issue 2, 1996, Pages 128-133

  Lyding, J W ^a   Shen, T C ^a   Abeln, G C ^a   Wang, C ^a   Tucker, J R ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DESORPTION; NANOTECHNOLOGY; OXIDATION; PASSIVATION; SCANNING TUNNELING MICROSCOPY; SURFACE TREATMENT; SURFACES; VACUUM APPLICATIONS;

NANOSCALE PATTERNING; SELECTIVE CHEMICAL REACTIVITY; SELECTIVE CHEMISTRY; ULTRAHIGH VACUUM SCANNING TUNNELING MICROSCOPY;

SEMICONDUCTING SILICON;

EID: 0030172461     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/7/2/006     Document Type: Article

References (22)

1. For a review see Shedd G M and Russell P E 1990 Nanotechnology 1 67
2. Lyo I-W and Avouris P 1991 Science 253 173
3. Aono M, Kobayashi A, Grey F, Uchida H and Huang D-H 1993 Japan. J. Appl. Phys. 32 1470
4. Lyding J W, Shen T-C, Hubacek J S, Tucker J R and Abeln G C 1994 Appl. Phys. Lett. 64 2010
5. Dagata J A, Schneir J, Harary H H, Evans C J, Postek M T and Bennet J 1990 Appl. Phys. Lett. 56 2001
6. Snow E S, Campbell P M and McMarr P J 1993 Appl. Phys. Lett. 63 749
7. Day H C and Allee D R 1993 Appl. Phys. Lett. 62 2691
8. Fay P, Brockenbrough R T, Abeln G, Scott P, Agarwala S, Adesida I and Lyding J W 1994 J. Appl. Phys. 75 7545
9. Becker R S, Higashi G S, Chabal Y J and Becker A J 1990 Phys. Rev. Lett. 65 1917
10. Boland J J 1991 Surf. Sci. 244 1
11. Virginia Semiconductor, Inc., Fredericksburg, VA 22401, USA
12. Maruno S, Iwasaki H, Horioka K, Li S T and Nakamura S 1983 Phys. Rev. B 27 4110
13. Boland J J 1992 Surf. Sci. 261 17
14. Owman F and Mårtensson P 1994 Surf. Sci. Lett. 303 367
15. Lyding J W, Skala S, Hubacek J S, Brockenbrough R and Gammie G 1988 Rev. Sci. Instrum. 59 1897
16. Brockenbrough R T and Lyding J W 1993 Rev. Sci. Instrum. 64 2225
17. Scott P A unpublished
18. Boland J J 1991 Phys. Rev. Lett. 67 1539
19. Höfer U, Li L and Heinz T F 1992 Phys. Rev. B 45 9485
20. Hamers R J, Avouris Ph and Bozso F 1987 Phys. Rev. Lett. 59 2071
21. For recent results see Shen T-C, Wang C, Abeln G C, Tucker J R, Lyding J W, Avouris Ph and Walkup R E 1995 Science 268 1590
22. Dufour G, Rochet F, Roulet H and Sirotti F 1994 Surf. Sci. 304 33