A planar air levitated electrostatic actuator system

Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines

Volumn , Issue , 1990, Pages 67-71

  Pister, Kristofer S J ^a   Fearing, Ronald S ^a   Howe, Roger T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEARINGS; ELECTRIC MOTORS, STEPPING TYPE--FRACTIONAL HORSEPOWER; ELECTROMECHANICAL DEVICES--MICROELECTROMECHANICAL; ELECTROSTATIC DEVICES; FRICTION--REDUCTION;

AIR BEARING; ELECTROSTATIC ACTUATOR; ELECTROSTATIC STEPPER MOTOR; MICROMOTOR;

ACTUATORS;

EID: 0025638746     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)