Design, fabrication, and testing of a C-shape actuator

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 416-419

  Lin, G ^a   Kim, C J ^a   Konishi, S ^a   Fujita, H ^a  

^a LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; ELECTROSTATICS; FABRICATION; FINITE ELEMENT METHOD; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYIMIDES; RESIDUAL STRESSES; SILICON WAFERS; SUBSTRATES; TESTING;

BIMORPH BEAMS; C-SHAPE MICROACTUATORS; NONLINEAR ANALYSIS; THERMAL ACTUATION;

ACTUATORS;

EID: 0029487499     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)