|
|
|
Volumn , Issue , 1991, Pages 1056-1059
|
|
Array-driven ultrasonic microactuators
a
a
NONE
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
ACTUATORS;
ELECTROMECHANICAL DEVICES - MICROELECTROMECHANICAL;
ELECTROSTATIC DEVICES;
PIEZOELECTRIC DEVICES;
ARRAY-DRIVEN ULTRASONIC MICROACTUATORS;
ELECTROSTATIC MODULE;
PIEZOELECTRIC MODULE;
ULTRASONIC TRANSDUCERS;
|
|
EID: 0026372868
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
|
Times cited : (37)
|
|
References (10)
|
