Novel process for a monolithic integrated accelerometer

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 589-592

  Offenberg, M ^a   Laermer, F ^a   Elsner, B ^a   Muenzel, H ^a   Riethmueller, W ^a  

^a ROBERT BOSCH GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CMOS INTEGRATED CIRCUITS; ELECTRON DEVICE MANUFACTURE; ETCHING; INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING; SEMICONDUCTOR DEVICE STRUCTURES; SENSORS; SURFACES;

MONOLITHIC INTEGRATED ACCELEROMETER; MONOLITHIC SENSORS; POLYSILICON FILMS; SURFACE TOPOGRAPHY;

ACCELEROMETERS;

EID: 0029488118     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)