Laser deposition and etching of three-dimensional microstructures

Transducers '91

Volumn , Issue , 1991, Pages 507-511

  Bloomstein, T M ^a   Ehrlich, D J ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; METAL CUTTING - LASER BEAM; SILICON AND ALLOYS - MACHINING;

LASER DIRECT WRITING PROCESS; PRECISION LASER DEPOSITION/ETCHING; THREE-DIMENSIONAL MICROMACHINING;

ELECTROMECHANICAL DEVICES;

EID: 0026397817     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)