Silicon monolithic micromechanical gyroscope

Transducers '91

Volumn , Issue , 1991, Pages 966-968

  Greiff, P ^a   Boxenhorn, B ^a   King, T ^a   Niles, L ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ELECTROMECHANICAL DEVICES - MICROELECTROMECHANICAL; SEMICONDUCTING SILICON; SIGNAL PROCESSING;

BURIED MOTOR TORQUE ELECTRODE; MONOLITHIC MICROMECHANICAL GYROSCOPE; MOTOR GIMBAL; RESONATOR GIMBAL; SMART WEAPONS;

GYROSCOPES;

EID: 0026366616     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)