The Evaluation of Hexafluorobenzene as an Environmentally Benign Dielectric Etch Chemistry

Journal of the Electrochemical Society

Volumn 148, Issue 12, 2001, Pages

  Chatterjee, Ritwik ^a   Karecki, Simon ^a   Reif, Rafael ^a   Sparks, Terry ^b   Vartanian, Victor ^b   Goolsby, Brian ^b  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012627762     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1415550     Document Type: Article

References (20)

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