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Applied Physics Letters

Volumn 77, Issue 2, 2000, Pages 256-258

Electrical properties of rapid thermal oxides on Si1-x-yGexCy films

(5) Bera, L K a Choi, W K a Feng, W a Yang, C Y b Mi, J b

a NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

b SANTA CLARA UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0011991191 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.126942 Document Type: Article

Times cited : (5)

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