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Volumn 85, Issue 9, 1999, Pages 6828-6837

X-ray photoelectron spectra of low temperature plasma anodized Si0.84Ge0.16 alloy on Si(100): Implications for SiGe oxidation kinetics and oxide electrical properties

(2) Riley, L S a Hall, S a

a UNIVERSITY OF LIVERPOOL (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000658076 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.370201 Document Type: Article

Times cited : (28)

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