Pulsed laser deposition of ferroelectric thin films for room temperature active microwave electronics

Integrated Ferroelectrics

Volumn 17, Issue 1-4, 1997, Pages 273-285

  Carter, Adriaan C ^a   Horwitz, James S ^a   Chrisey, Douglas B ^a   Pond, Jeffrey M ^a   Kirchoefer, Steven W ^a   Chang, Wontae ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

BST; Ferroelectric thin films; Grain size; KTN; Loss tangent; Microwave devices; Pulsed laser deposition; Tunable capacitor

Indexed keywords

ANNEALING; CAPACITANCE; CAPACITORS; CRYSTAL ORIENTATION; DEPOSITION; DIELECTRIC PROPERTIES OF SOLIDS; FERROELECTRIC MATERIALS; FILM GROWTH; GRAIN SIZE AND SHAPE; PULSED LASER APPLICATIONS; THERMAL EFFECTS; THIN FILMS;

BARIUM STRONTIUM TITANATE; PULSED LASER DEPOSITION;

DIELECTRIC FILMS;

EID: 7444263632     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708013002     Document Type: Article

References (8)

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