Reducing baseline defect density through modeling random defect-limited yield

MICRO

Volumn 18, Issue 1, 2000, Pages 61-71

  Segal, Julie ^a,b   Milor, Linda ^a,c,d   Peng, Yeng Kaung ^e  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b STANFORD UNIVERSITY   (United States)

^c ADVANCED MICRO DEVICES   (United States)

^d UNIVERSITY OF MARYLAND   (United States)

^e UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010046785     PISSN: 10810595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (19)

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