Electronic devices on ion implanted diamond

Journal of Wide Bandgap Materials

Volumn 7, Issue 1, 1999, Pages 4-67

  Zaitsev, Alexander M ^a,f   Denisenko, Andrej V ^a,g   Kosaca, Gabriele ^a   Job, Reinhart ^a   Fahrner, Wolfgang R ^a   Melnikov, Alexander A ^b   Varichenko, Valery S ^b   Buchard, Bernd ^c   Von Borany, Johannes ^d   Werner, Matthias ^e  

^a UNIVERSITY OF HAGEN   (Germany)

^b BELARUSIAN STATE UNIVERSITY   (Belarus)

^c INFINEON TECHNOLOGIES AG   (Germany)

^d Forschungszentrum Rosendorf   (Germany)

^e DEUTSCHE BANK AG   (Germany)

^f RUHR UNIVERSITY BOCHUM   (Germany)

^g UNIVERSITY OF ULM   (Germany)

Author keywords

Boron acceptors; Diamond; Electronic devices; Ion implantation; Lithium donors

Indexed keywords

BORON; CHARGE CARRIERS; DIAMONDS; ION IMPLANTATION; LITHIUM; MICROELECTRONICS; RADIATION DAMAGE; SEMICONDUCTOR DOPING; SOLID STATE DEVICES;

BORON ACCEPTORS; DIAMOND ELECTRONICS; ELECTRICAL COMPENSATION; LITHIUM DONORS;

ELECTRONIC EQUIPMENT;

EID: 0006010979     PISSN: 1524511X     EISSN: 15308081     Source Type: Journal    
DOI: 10.1106/74CC-M5WA-YPM5-UHCN     Document Type: Article

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