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Journal of Applied Physics

Volumn 89, Issue 5, 2001, Pages 2556-2559

Effect of implant temperature on secondary defects created by MeV Sn implantation in silicon

(4) Wong Leung, J a Jagadish, C a Conway, M J a Fitz Gerald, J D a

a AUSTRALIAN NATIONAL UNIVERSITY (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001542994 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1340602 Document Type: Article

Times cited : (15)

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