Ion-implantation in bulk semi-insulating 4H-SiC

Journal of Applied Physics

Volumn 86, Issue 2, 1999, Pages 752-758

  Rao, Mulpuri V ^a   Tucker, Jesse B ^a   Ridgway, M C ^b   Holland, O W ^c   Papanicolaou, N ^d   Mittereder, J ^d  

^a George Mason University   (United States)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^c OAK RIDGE NATIONAL LABORATORY   (United States)

^d NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001258202     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.370799     Document Type: Article

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