In-situ TEM characterization of whiskers on Al electrodes for thin-film transistors

Materials Research Society Symposium - Proceedings

Volumn 441, Issue , 1997, Pages 421-426

  Tsujimoto, K ^a   Tsuji, S ^a   Saka, H ^a   Kuroda, K ^a   Takatsuji, H ^a   Suzuki, Y ^a  

^a ITES Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CRYSTAL WHISKERS; ELECTRIC CONDUCTIVITY OF SOLIDS; ETCHING; INTERFACES (MATERIALS); ION BEAMS; LIQUID CRYSTAL DISPLAYS; MORPHOLOGY; NANOSTRUCTURED MATERIALS; SINGLE CRYSTALS; THIN FILM TRANSISTORS; TRANSMISSION ELECTRON MICROSCOPY;

HIGH VOLTAGE TRANSMISSION ELECTRON MICROSCOPY (HV TEM);

ELECTRODES;

EID: 0030653094     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)