Effect of Carrier Gas on Chemical Vapor Deposition of Copper with (Hexafluoroacetylacetonate)Cu(I)(3,3-Dimethyl-1-butene)

Journal of the Electrochemical Society

Volumn 148, Issue 7, 2001, Pages

  Choi, Kyeong Keun ^a   Rhee, Shi Woo ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000073161     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1375168     Document Type: Article

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