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Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 344-347

A new type of tactile sensor detecting contact force and hardness of an object

(4) Shimizu, T a Shikida, M a Sato, K a Itoigawa, K b

a NAGOYA UNIVERSITY (Japan)

b Tokai Rika Co Ltd (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT SENSORS; FORCE MEASUREMENT; HARDNESS; MICROACTUATORS; MICROMACHINING; MICROSENSORS;

CONTACT FORCE; HARDNESS DISTRIBUTION; TACTILE SENSOR;

MICROELECTROMECHANICAL DEVICES;

EID: 0036122135 PISSN: 10846999 EISSN: None Source Type: Journal
DOI: 10.1109/MEMSYS.2002.984273 Document Type: Article

Times cited : (26)

References (7)

1
- 0022320523
- A capacitive silicon tactile image array
- (1985) Proc. of the 3rd Int. Conf. on Solid-State Sensors and Actuators , pp. 22-25
- Chun, K.J.¹ Wise, K.D.²

2
- 0022291143
- A force sensing chip designed for robotic and manufacturing automation application
- (1985) Proc. of the 3rd Int. Conf. on Solid-State Sensors and Actuators , pp. 30-32
- Petersen, K.¹ Kowalski, C.² Brown, J.³ Allen, H.⁴ Knutti, J.⁵

3
- 0029517967
- A CMOS compatible traction stress sensing element for use in high resolution tactile image
- (1995) Proc. of the 8th Int. Conf. on Solid-State Sensors and Actuators , pp. 648-651
- Kane, B.J.¹ Kovacs, G.T.A.²

4
- 0029489275
- Silicon three-axial tactile sensor
- (1995) Proc. of the 8th Int. Conf. on Solid-State Sensors and Actuators , pp. 656-659
- Chu, Z.¹ Sarro, P.M.² Middlehoek, S.³

5
- 0030689090
- A very high density bulk micromachined capacitive tactile imager
- (1997) Proc. of the 9th Int. Conf. on Solid-State Sensors and Actuators , pp. 656-659
- De Souza, R.J.¹ Wise, K.D.²

6
- 0032640072
- Development of a microfine active bending catheter equipment with MIF tactile sensors
- (1999) Proc. IEEE MEMS'99 Conference , pp. 412-417
- Takizawa, H.¹ Tosaka, H.² Ohta, R.³ Kaneko, S.⁴ Ueda, Y.⁵

7
- 0030702617
- Tactile sensor using piezoelectric resonator
- (1997) Proc. of the 9th Int. Conf. on Solid-State Sensors and Actuators , pp. 117-120
- Maezawa, M.¹ Imahashi, T.² Kuroda, Y.³ Adachi, H.⁴ Yanagisawa, K.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.