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Volumn 2, Issue , 1996, Pages 1149-1152
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Micromachined cellular filters
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Author keywords
[No Author keywords available]
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Indexed keywords
CELLULAR TELEPHONE SYSTEMS;
ELECTRODES;
PIEZOELECTRIC MATERIALS;
RESONATORS;
SEMICONDUCTING ALUMINUM COMPOUNDS;
SEMICONDUCTING SILICON;
SEMICONDUCTING ZINC COMPOUNDS;
SPUTTER DEPOSITION;
SUBSTRATES;
TELECOMMUNICATION;
THIN FILM DEVICES;
ALUMINUM NITRIDE;
ETHYLENE DIAMINE PYROCATHECOL;
FILM BULK ACOUSTIC WAVE RESONATOR;
MICROMACHINED CELLULAR FILTERS;
THIN FILM RESONATOR;
THIN PIEZOELECTRIC FILMS;
ACOUSTIC SURFACE WAVE FILTERS;
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EID: 0029708217
PISSN: 0149645X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (23)
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References (10)
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