Characterization of dynamics and power handling of RF MEMS using vector measurement techniques

IEEE Transactions on Microwave Theory and Techniques

Volumn 52, Issue 11, 2004, Pages 2627-2633

  Girbau, David ^a   Lázaro, Antonio ^a   Pradell, Lluís ^a  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

Dynamics; In phase quadrature (I Q) demodulator; MEMS switch, self actuation; Microwave microelectromechanical systems (MEMS) variable capacitor

Indexed keywords

CAPACITORS; ELECTRIC RESISTANCE; FIELD EFFECT TRANSISTORS; MICROWAVE DEMODULATORS; MICROWAVE DEVICES; MICROWAVE MEASUREMENT; NATURAL FREQUENCIES; RADIO FREQUENCY AMPLIFIERS;

MICROWAVE MICROELECTROMECHANICAL SYSTEMS (MEMS); POWER DETECTORS; POWER HANDLING; SELF-ACTUATION;

MICROELECTROMECHANICAL DEVICES;

EID: 9244259641     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2004.837198     Document Type: Conference Paper

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