RF MEMS switches with enhanced power-handling capabilities

IEEE Transactions on Microwave Theory and Techniques

Volumn 52, Issue 1 I, 2004, Pages 59-68

  Peroulis, Dimitrios ^a   Pacheco, Sergio P ^a,b   Katehi, Linda P B ^a,c  

^a UNIVERSITY OF MICHIGAN   (United States)

^b MOTOROLA INC   (United States)

^c PURDUE UNIVERSITY   (United States)

Author keywords

Power handling capabilities; RF microelectromechanical systems (MEMS) switch; Self actuation; Stiction due to high RF power; Top electrode

Indexed keywords

CAPACITANCE; ELECTRIC CONDUCTORS; ELECTRODES; SWITCHES; WAVEGUIDES;

HOT SWITCHING; SELF-ACTUATION; TOP ELECTRODE;

MICROELECTROMECHANICAL DEVICES;

EID: 1242263481     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2003.821234     Document Type: Article

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