Extended tuning range RF MEMS variable capacitors using electrostatic and electrothermal actuators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5344, Issue , 2004, Pages 59-70

  Girbau, David ^a   Lázaro, Antonio ^a   Pradell, Lluís ^a  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

Electrostatic actuation; Electrothermal actuation; MEMS; Tuning range; Variable capacitor

Indexed keywords

ELECTROSTATIC ACTUATION; ELECTROTHERMAL ACTUATION; MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS); TUNING RANGE; VARIABLE CAPACITORS;

CAPACITORS; ELECTRIC INDUCTORS; ELECTROSTATIC ACTUATORS; INTEGRATED CIRCUITS; POLYSILICON; VOLTAGE CONTROL; VOLTAGE MEASUREMENT;

MICROELECTROMECHANICAL DEVICES;

EID: 2142772813     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524422     Document Type: Conference Paper

References (8)

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