Electromagnetic modeling of thin-film bulk acoustic resonators

IEEE Transactions on Microwave Theory and Techniques

Volumn 52, Issue 11, 2004, Pages 2496-2502

  Farina, Marco ^a   Rozzi, Tullio ^a  

^a UNIVERSITÀ POLITECNICA DELLE MARCHE   (Italy)

Author keywords

Bulk acoustic wave (BAW) devices; Electromagnetic (EM) analysis; Method of moments

Indexed keywords

ACOUSTIC WAVES; ELECTROMAGNETISM; INTEGRATED CIRCUITS; MAXWELL EQUATIONS; METHOD OF MOMENTS; NETWORKS (CIRCUITS); PROBLEM SOLVING; THIN FILMS;

ACOUSTIC LINEAR EQUATIONS; BULK ACOUSTIC WAVES (BAW) DEVICES; ELECTROMAGNETIC (EM) ANALYSIS; ELECTROMAGNETIC ANALYSIS;

RESONATORS;

EID: 9244231124     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2004.837152     Document Type: Conference Paper

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