A 3-D integral equation-based approach to the analysis of real-life MMICs - Application to microelectromechanical systems

IEEE Transactions on Microwave Theory and Techniques

Volumn 49, Issue 12, 2001, Pages 2235-2240

  Farina, Marco ^a,b   Rozzi, Tullio ^a,b  

^a IEEE   (Italy)

^b UNIVERSITÀ POLITECNICA DELLE MARCHE   (Italy)

Author keywords

MEMS; Method of moments; MMICs; Switches

Indexed keywords

METAL-INSULATOR-METAL CAPACITORS; MICROELECTROMECHANICAL CAPACITIVE SWITCHES;

CAPACITANCE; CAPACITORS; DIELECTRIC PROPERTIES; ELECTRIC CONDUCTIVITY; ELECTRIC INDUCTORS; ELECTRIC INSULATORS; ELECTRIC SWITCHES; INTEGRAL EQUATIONS; METALLIZING; METHOD OF MOMENTS; MICROELECTROMECHANICAL DEVICES; MICROWAVES; MILLIMETER WAVES; MIM DEVICES; SPECTRUM ANALYSIS;

MONOLITHIC MICROWAVE INTEGRATED CIRCUITS;

EID: 0035679966     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.971605     Document Type: Conference Paper

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