Measurement of effective kt2, Q, Rp, Rs vs. temperature for Mo/AlN FBAR resonators

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2002, Pages 939-943

  Larson III, John D ^a   Oshmyansky, Yury ^b  

^a AGILENT LABORATORIES   (United States)

^b AGILENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ALUMINUM NITRIDE; ELECTRIC RESISTANCE MEASUREMENT; ELECTRODES; MOLYBDENUM; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT; SCATTERING PARAMETERS; SPUTTERING; TEMPERATURE; THERMAL LOAD; THIN FILMS;

FILM BULK ACOUSTIC RESONATOR; MOLYBDENUM ELECTRODE; TEMPERATURE COEFFICIENT;

ACOUSTIC RESONATORS;

EID: 0036995122     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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2. J. D. Larson III, R. C. Ruby, P. D. Bradley, J. Wen, S-L Kok, A. Chien, "Power Handling and Temperature Studies in FBAR Duplexers for the 1900 MHz PCS Band," 2000 IEEE Ultrasonics Symposium Proc., San Juan, Puerto Rico, Oct. 22-25, 2000, pp. 869-874.
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4. J. D. Larson III, P. D. Bradley, S. Wartenberg, R. C. Ruby, "Modified Butterworth-Van Dyke Circuit for FBAR Resonators & Automated Measurement System," 2000 IEEE Ultrasonics Symposium Proc., San Juan, Puerto Rico, Oct. 22-25, 2000, pp. 863-868.
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9. F. Farraro, R. B. McLellan, "Temperature Dependence of the Young's Modulus and Shear Modulus of Pure Nickel, Platinum, and Molybdenum." Metallurgical Trans. A, Vol. 8A, Oct. 1977, pp. 1563-65.
10. ____, "IRE Standards on Piezoelectric Crystals: Measurements of Piezoelectric Ceramics, 1961," 61 IRE 14.S1, eq.13, 1961, IEEE, 442 Hoes Lane, Piscataway, NJ.
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