Electromagnetic modeling of thin-film bulk acoustic resonators

IEEE MTT-S International Microwave Symposium Digest

Volumn 1, Issue , 2004, Pages 383-386

  Farina, Marco ^a   Rozzi, Tullio ^a  

^a UNIVERSITÀ POLITECNICA DELLE MARCHE   (Italy)

Author keywords

Bulk acoustic wave devices; Electromagnetic Analysis; Method of Moments

Indexed keywords

ELECTRODE SURFACES; ELECTROMAGNETIC ANALYSIS; MONO-DIMENSIONAL BEHAVIOR; PASSIVE MICROWAVE COMPONENTS;

ACOUSTIC RESONATORS; ELECTRIC FIELD EFFECTS; ELECTRODES; ELECTROMAGNETIC FIELDS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MAXWELL EQUATIONS; METHOD OF MOMENTS; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; PARAMETER ESTIMATION; PIEZOELECTRICITY; THIN FILMS;

ACOUSTIC BULK WAVE DEVICES;

EID: 4444235283     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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4. T. Makkonen, A. Holappa, J. Hella and M. M. Salomaa, "Finite Element Simulations of Thin-Film composite SAW Resonators", IEEE Trans. Ultrason. Ferroelect. Freq. Contr., vol. 48, no. 5, Sept. 2001, pp.1241-1257
5. Q. X. Su et al., "Thin-Film Bulk Acoustic Resonators and Filters Using ZnO and Lead-Zirconium-Titanate Thin Films", IEEE Trans. Microwave Theory and Tech., vol. 49, No. 4, April 2001, pp. 769-778
6. M. Farina, and T. Rozzi, "A 3-D Integral Equation-Based Approach to the Analysis of Real Life MMICs: Application to Microelectromechanical Systems", IEEE Trans. Microwave Theory Tech, vol. 49, no. 12 December 2001, pp. 2235-2240