High performance RF-filters suitable for above IC integration: Film bulk-acoustic-resonators (FBAR) on silicon

Proceedings of the Custom Integrated Circuits Conference

Volumn , Issue , 2003, Pages 141-146

  Aigner, Robert ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE FILTERS; CODE DIVISION MULTIPLE ACCESS; COMPUTER SIMULATION; GLOBAL SYSTEM FOR MOBILE COMMUNICATIONS; INTEGRATED CIRCUIT LAYOUT; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC MATERIALS; QUARTZ; SILICON ON INSULATOR TECHNOLOGY; TELEPHONE SETS;

FILM BULK ACOUSTIC RESONATORS; MOBILE PHONES; RADIO FREQUENCY FILTERS; SYSTEM IN PACKAGE; SYSTEM ON CHIP;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 0242696145     PISSN: 08865930     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. J.F. Rosenbaum, Bulk Acoustic Wave Theory and Devices, Arctech House, Boston London, 1988
2. K.M. Lakin, G.R. Kline, K.T. McCarron, High-Q Microwave Acoustic Resonators and Filters, IEEE Transactions on Microwave Theory and Techniques, Vol.41, No. 12, Dec. 1993
3. R. Ruby, P. Bradley, J. Larson, Y. Oshmyansyk, D. Figueredo, Ultra-Miniature High-Q Filters and Duplexers using FBAR Technology, IEEE ISSCC2001 conference, Feb. 6, (2001)
4. R. Ruby, A. Barfknecht, C. Han, Y. Desai, F. Geefay, G. Gan, M. Gat, T. Verhoeven, "High-Q FBAR Filters in a Wafer-Level, Chip-Scale Package", IEEE ISSCC 2002 conference, Feb. 2002
5. R. Aigner, J. Ella, H.J. Timme, L. Elbrecht, W. Nessler, S. Marksteiner, Advancement of MEMS into RF-Filter Applications, Proceedings of IEEE 2002 IEDM conference, San Francisco Dec. 8th-11th, 2002
6. R. Aigner, J. Kaitila, J. Ellä, L. Elbrecht, W. Nessler, M. Handtmann, T.-R. Herzog, S. Marksteiner, "Bulk-Acoustic-Wave Filters: Performance Optimization and Volume Manufacturing", to be presented at IMS-MTTS 2003, Philadelphia June 2003