Finite element simulations of thin-film composite BAW resonators

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 48, Issue 5, 2001, Pages 1241-1258

  Makkonen, Tapani ^a,b   Holappa, Antti ^b   Ellä, Juha ^c   Salomaa, Martti M ^b  

^a IEEE   (Finland)

^b AALTO UNIVERSITY   (Finland)

^c NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

THIN-FILM BULK ACOUSTIC WAVE (BAW) RESONATORS;

ACOUSTIC WAVES; ALGORITHMS; COMPUTER SOFTWARE; EIGENVALUES AND EIGENFUNCTIONS; FINITE ELEMENT METHOD; HARMONIC ANALYSIS; MATHEMATICAL MODELS; OPTIMIZATION; PIEZOELECTRIC MATERIALS; STORAGE ALLOCATION (COMPUTER);

RESONATORS;

ARTICLE;

EID: 0035437724     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.949733     Document Type: Review

References (64)

1. Finite element method for piezoelectric vibration
2. Computation of the vibrational modes for piezoelectric array transducers using a mixed finite element-perturbation method
3. Electromechanical modeling using explicit time-domain finite elements
4. Finite-element solution of periodic waveguides for acoustic waves
5. FEM analysis of the reflection coefficient of SAWs in an infinite periodic array
6. Simulations of piezoelectric Lamb wave delay lines using a finite clement method
7. Three dimensional finite element modeling of quartz crystal strip resonators
8. A 400 MHz one-chip oscillator using and air-gap type thin film resonator
9. A thin-film bulk-acoustic-wave resonator-controlled oscillator on silicon
10. Monolithic bulk acoustic filters to X-band in GaAs
11. Fundamental-mode VHF/UHF miniature acoustic resonators and filters on silicon
12. Acoustic bulk wave composite resonators
13. Composite thin film UHF bulk acoustic wave resonators on GaAs
14. Development of miniature filters for wireless applications
15. An air-gap type piezoelectric composite thin film resonator
16. High-Q microwave acoustic resonators and filters
17. Modeling of thin film resonators and filters
18. Fundamental properties of thin film resonators
19. Analysis and design of coupled-mode miniature bar resonators and monolithic filters
20. Two-dimensional theory of thin-film ZnO resonators on silicon
21. Analysis of composite resonator geometries
22. Numerical analysis of two dimensional thin film resonators
23. 2 bulk wave resonators on high resistance substrates
24. Improvements in 2D FEM modeling software for crystal resonators
25. Thin film resonator technology
26. Laser probing and FEM modeling of solidly mounted resonators
27. Analysis of piezoelectric structures by a finite element method
28. Hamilton's principle for linear piezoelectric media
29. A variational principle for the equations of piezo-electromagnetism in elastic dielectric crystals
30. High frequency vibrations of piezoelectric crystal plates
31. A two-dimensional theory for high-frequency vibrations of piezoelectric crystal plates with or without electrodes
32. Simulation of piezoelectric devices by two- and three-dimensional finite elements
33. Representation of dielectric, elastic, and piezoelectric losses by complex coefficients
34. Finite element simulation of local vibration of a piezoelectric plate considering energy losses
35. Finite elements for piezoelectric vibrations with open electric boundaries
36. Mechanical displacement induced in a piezoelectric structure: Experimental measurement by laser interferometry and simulation by a finite element method
37. Vibrational response of sonar transducers using piezoelectric finite elements
38. The finite element analysis of the vibration characteristics of piezoelectric discs
39. Measurement and prediction of the frequency spectrum of piezoelectric disks by modal analysis
40. Algorithms for eigenvalue problems in piezoelectric finite element analyses
41. Implementation of the gibbs-poole-stockmeyer and gibbs-king algorithms
42. Numerical algorithms for solutions of large eigenvalue problems in piezoelectric resonators
43. A laminated plate theory for high frequency, piezoelectric thin-film resonators
44. Numerical analysis of thickness shear thin film piezoelectric resonators using a laminated plate theory
45. Effect of mesa-shaping on spurious modes in ZnO/Si bulk-wave composite resonators
46. A three-dimensional acoustic infinite element based on a prolate spheroidal multipole expansion
47. Thin film bulk acoustic wave filters for CPS
48. Energy trapping and related studies of multiple electrode filter crystals
49. 3D FEM modeling of composite BAW resonators
50. Scanning Michelson interferometer for imaging surface acoustic wave fields
51. Imaging of acoustic fields in bulk acoustic-wave thin-film resonators
52. Optical scanning interferometer for dynamic imaging of high-frequency surface motion
53. Optical mapping of surface vibrations on a thin-film resonator near 2 GHz
54. A variational method for the design of trapped energy resonators