Methods to recognize the sample position for most precise interferometric length measurements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5532, Issue , 2004, Pages 237-247

  Schodel R ^a   Decker, Jennifer E ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERA SYSTEMS; INTERFERENCE PHASE MAPS; PHASE EVALUATION; REGIONS OF INTEREST (ROI);

CAMERAS; ERROR ANALYSIS; LASERS; LIGHT SOURCES; TEMPERATURE CONTROL; THERMAL EXPANSION;

INTERFEROMETERS;

EID: 9144263351     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.555835     Document Type: Conference Paper

References (7)

1. G. Bönsch 2001. Automatic gauge block measurements by phase stepping interferometry with three laser wavelengths. Proc. SPIE 4410:1-10 (2001).
2. J. E. Decker, R. Schödel and G. Bönsch. Next-generation Kösters Interferometer. Proc. SPIE 5190:14-23 (2003).
3. J. E. Decker, R. Schödel, G. Bönsch. Considerations for the evaluation of measurement uncertainty in interferometric gauge block calibration applying methods of phase step interferometry. Metrologia 41:L11-L17 (2004).
4. R. Schödel and G. Bönsch 2001. Precise interferometric measurements at single crystal silicon yielding thermal expansion coefficients from 12°C to 28°C and compressibility. Proc. SPIE 4410:54-62.
5. R. Schödel, A. Nicolaus and G. Bönsch. Minimizing interferometer misalignment errors for measurement of sub-nanometer length changes. In Recent Developments in Traceable Dimensional Measurements II, Decker, Brown, eds., Proc.SPIE 5190:34-42 (2003).
6. R. Schödel, A. Nicolaus and G. Bönsch. Phase stepping interferometry: Methods for reducing errors caused by camera nonlinearities. Appl. Opt. 41, 55 - 63 (2002)
7. J. E. Decker, J.R. Miles, A.A. Madej, R.F. Siemsen, K.J. Siemsen, Sebastian de Bonth, K. Bustraan, S. Temple, and J.R. Pekelsky. Increasing the range of unambiguity in step-height measurement with multiple - wavelength interferometry-application to absolute long gauge block measurement. Appl. Opt. 42, 5670-5678 (2003).