Increasing the range of unambiguity in step-height measurement with multiple-wavelength interferometry—application to absolute long gauge block measurement

Applied Optics

Volumn 42, Issue 28, 2003, Pages 5670-5678

  Decker, Jennifer E ^a   Miles, John R ^b   Madej, Alan A ^a   Siemsen, Ralph F ^a   Siemsen, Klaus J ^a   De Bonth, Sebastian ^c   Bustraan, Krijn ^c   Temple, Sara ^a   Pekelsky, James R ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b CSIRO   (Australia)

^c EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; COMPUTER SIMULATION; INTERFEROMETRY; SPATIAL VARIABLES MEASUREMENT;

HEIGHT MEASUREMENT;

OPTICAL SYSTEMS;

EID: 0141925189     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.42.005670     Document Type: Article

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