Considerations for the evaluation of measurement uncertainty in interferometric gauge block calibration applying methods of phase step interferometry

Metrologia

Volumn 41, Issue 3, 2004, Pages

  Decker, Jennifer E ^a   Schödel, René ^b   Bönsch, Gerhard ^b  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CALIBRATION; CORRELATION METHODS; ERROR ANALYSIS; EXTRAPOLATION; GAGES; IMAGE PROCESSING; MATHEMATICAL MODELS; OPTICAL PHASE CONJUGATION;

FRINGE FRACTION; GAUGE BLOCK; PHASE STEPPING INTERFEROMETRY; WAVELENGTH;

INTERFEROMETRY;

EID: 3042680079     PISSN: 00261394     EISSN: None     Source Type: Journal    
DOI: 10.1088/0026-1394/41/3/L03     Document Type: Article

References (16)

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5. ISO 1993 Guide to the Expression of Uncertainty in Measurement (GUM) (Geneva: International Organization for Standardization)
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9. ISO GUM op. cit. section H.3
10. ISO GUM op. cit. section F.2.2.1
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15. ISO GUM op. cit. section H.1.2
16. ISO GUM op. cit. section 5.2.2