Minimizing interferometer misalignment errors for measurement of sub-nanometer length changes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5190, Issue , 2003, Pages 34-42

  Schodel R ^a   Nicolaus, Arnold ^a   Bonsch G ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

GEOMETRICAL PROPERTIES; INTERFEROMETER MISALIGNMENT ERRORS; LOW EXPANSION MATERIALS; PRESSURE BALANCE;

DIMENSIONAL STABILITY; HELIUM NEON LASERS; MOIRE FRINGES; NEODYMIUM LASERS; OPTICAL COLLIMATORS; THERMAL EXPANSION;

INTERFEROMETERS;

EID: 2342620142     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.503677     Document Type: Conference Paper

References (11)

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