Precise interferometric measurements at single crystal silicon yielding thermal expansion coefficients from 12°C to 28°C and compressibility

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4401, Issue , 2001, Pages 54-62

  Schodel R ^a   Bonsch G ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; COMPRESSIVE STRENGTH; DISLOCATIONS (CRYSTALS); GAGE BLOCKS; MECHANICAL VARIABLES MEASUREMENT; SEMICONDUCTING SILICON; SINGLE CRYSTALS; THERMAL EXPANSION;

COMPRESSIBILITY MEASUREMENT; TWYMAN-GREEN INTERFEROMETER; ULTRASONIC WAVE VELOCITIES;

INTERFEROMETRY;

EID: 0035761147     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.445624     Document Type: Conference Paper

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