Measurement of the absolute CF2 concentration in a dielectric barrier discharge running in argon/fluorocarbon mixtures

Journal of Physics D: Applied Physics

Volumn 37, Issue 21, 2004, Pages 3000-3007

  Vinogradov, I P ^a   Dinkelmann, A ^a   Lunk, A ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DIELECTRIC MATERIALS; ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ULTRAVIOLET SPECTROSCOPY;

DIELECTRIC BARRIER DISCHARGES (DBD); LOW PRESSURE PLASMAS; PLASMA PROCESSING; PLASMA SURFACE INTERACTION;

FLUOROCARBONS;

EID: 9144238885     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/21/010     Document Type: Article

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