Precursor chemistries for the electronics, opto-electronics and optical industries

Journal of Materials Chemistry

Volumn 14, Issue 21, 2004, Pages 3071-3080

  Irven, John ^a,b,c,d,e  

^a AIR PRODUCTS AND CHEMICALS INC   (United States)

^b QUEEN MARY UNIVERSITY OF LONDON   (United Kingdom)

^c R and D in Industrial Gases   (United Kingdom)

^d TWI Res Board Joining Technologies   (United Kingdom)

^e EPSRC ^*  (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CHALLENGES; CHEMICAL GASES; MICROMINIATURIZATION; OPTICAL INDUSTRIES;

ELECTRONICS INDUSTRY; INDUSTRIAL RESEARCH; OPTOELECTRONIC DEVICES; TECHNICAL PRESENTATIONS;

MATERIALS SCIENCE;

CONFERENCE PAPER; DEVICE; ELECTRONICS; GAS ANALYSIS; OPTICAL RESOLUTION; OPTICS; PURIFICATION;

EID: 9144222243     PISSN: 09599428     EISSN: None     Source Type: Journal    
DOI: 10.1039/b405703a     Document Type: Conference Paper

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