Through-wafer interrogation of microstructure motion for MEMS feedback control

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3878, Issue , 1999, Pages 281-292

  Dawson, J M ^a   Chen, J ^a   Brown, K S ^a   Famouri, P ^a   Hornak, L A ^a  

^a WEST VIRGINIA UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTIVE OPTICS; FEEDBACK CONTROL; INTEGRATED OPTICS; MONITORING; NONLINEAR CONTROL SYSTEMS; OPTICAL INSTRUMENTS; OPTICAL RESONATORS;

MULTI USER MEMS PROCESS SERVICE; OPTICAL METROLOGY; OPTICAL MONITORING; THROUGH WAFER OPTICS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033319979     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)